II. MicroAssembly

Reliably and repeatedly assemble 3 or more MicroMachined components with subMicron accuracy.

Technology for fabricating micromechanical structures has made tremendous progress in the past 5 years. We now need high precision methods for assembling Hybrid microassemblies, with components fabricated with different processes. Precision techniques are also needed for non-silicon components in camcorders, copiers, magnetic and optical drives, etc.

(See Pister 92, Fukuda 94, Bohringer and Donald 94, ...)